Florida and California Inventors Patent Plasma Process
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According to an article posted on Reed Electronics.com, Kent Rossman of Orlando, Florida, along with Zhong Qiang Hua of Saratoga, California, Zhengquan Tan of Cupertino, California, and Zhuang Li of San Jose, California, has developed a new multistep remote plasma clean process which was originally filed on May 21, 2002 and has now become a registered patent.
The invention relates to a "process for removing unwanted deposition build-up from one or more interior surfaces of a substrate processing chamber after depositing a layer of material over a substrate disposed in the chamber," according to the United States Patent & Trademark Office.
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